Magnetron Sputtering System

Manufacture : AJA International

ATC Series Sputtering Systems

ATC Series Thin Film Deposition Systems are versatile coating tools that can be built in a wide variety of configurations to satisfy almost any requirement. These systems are built around AJA's unique A300-XP (UHV) or Stiletto Series (HV) magnetron sputtering sources which feature in-situ source head tilting allowing precise and repeatable con-focal, direct, and off-axis deposition.

Substrate holders from 1" to 10" diameter are available with heating to 1000°C and/or substrate cooling from ambient to LN 2 tempera-tures. AJA magnetron sputter sources from 1" diameter to 12" diameter plus rectangular and triangular versions can be incorporated.

These multi-technique deposition systems can also be fitted with electron beam evaporation, thermal evaporation, Knudsen cells, PLD, ion sources for IBAD, facing target sputtering sources (FTS), contact masking systems, glove boxes, auto-loading cassette systems, RHEED, Auger analysis, and RGA's.

Available system sizes (sputter up or down);

ATC 1300 : 13" diameter *	ATC 2200 : 22" diameter *
ATC 1500 : 15" diameter *	ATC 2400 : 24" diameter *
ATC 1800 : 18" diameter *	ATC 2800 : 28" diameter *
ATC 2000 : 20" diameter *

Custom chambers are available upon request
* The max. no.of sputter source will depend on the substrate size, configuration and magnetron sputter source size

ATC 2000 with (6) A320-XP 2" UHV sputter sources with in-situ tilt, 1200 l/s turbopump, 850 degree C rotating substrate heater with RF bias, computer control and (6) substrate cassette elevator in the load-lock for 4" substrates

ATC ORION Series Sputtering Systems

The AJA International, Inc. ATC ORION Series Sputtering Systems are compact versions of the popular ATC Series designed to deliver maximum performance for limited budgets. These HV and UHV systems inherit many design features and common parts from the highly evolved ATC-V & ATC-F sputtering tools and offer some unique features such as TUNING CHIMNEYS (patent applied) designed to optimize deposition uniformity.

The standard ATC ORION modules (chambers, frames, cluster flanges, etc.) are generally in stock at AJA reducing delivery time. These systems use AJA's exclusive ST-20-O (HV) and A320-XP-O (UHV) 2” magnetron sputtering sources and can be fitted with 850 °C heaters for substrates up to 4" diameter.

Substrates up to 5.25" diameter and 4" x 4" can be accommodated with special carriers and are limited to 350°C.

Available system sizes (sputter up or down);

ATC ORION 3 UHV : 1 to 3 UHV Magnetron sputtering sources

ATC ORION 5 UHV : 1 to 5 UHV Magnetron sputtering sources

ATC ORION 4 HV : 1 to 4 HV Magnetron sputtering sources

ATC ORION 5 HV : 1 to 5 HV Magnetron sputtering sources

ATC ORION 4HV

ATC ORION 5UHV

Magnetron Sputtering Sources & related accessories

Manufacture : AJA International

A300-XP UHV Sputtering Sources 1 to 10 diameter target manual or in-situ source head tilt intergral shutters and gas rings convertible target module versions custom designs available   UHV & HV CLuster Flange CF, ISO or wire seal flanges manual, insitu or linked in-situ tilt integral shutters and gas rings compact ORION cluster flanges TURRET gusns for difficult retrofits custom designs available

Stiletto & STXL UH Sputtering Source dia to 40 long, internal & external tilt, shutter and gas ring options target jacking for magnetic materials   Nautilus Sereis Rotating magnetrons 6 to 12 diameter targets integrated hinge plate and gas ring modular magnet array to optimize uniformity and target utilization   Cylindrical Target Sputtering sources ideal for low damage OLED applications large sizes to coat all sides of substrate pass through versions for wire/tube coating

 

Power Supplies & Matching Networks

Manufacture : AJA International

• Specifications

		Power	Model Number
DC Power Supplies : Supplies feature efficient switching technoloty, power /voltage regulation, arc suppression, remote connector and interlocks		500 watt	A500DC
		1000 watt	A1000DC
		1500 watt	A1500DC
RF Power Supplies : Solid state supplies are fully programmable with process storage and power ramp-up and down to reduce thermal stress on targets		500 watt	A500RF
		1000 watt	A1000RF
		2000 watt	A2000RF
RF Auto-Matching : Networks feature one vacuum and one air capacitor for optimum relicablity. Air cooling is standard on smaller units.		500 watt	A500MU
		1000 watt	A1000MU
		2000 watt	A2000MU
Low Power RF : Integrated power supply / manual matchbox makes this package ideal for powering small sources.		100 watt	A100RF/MM

Quartz Halogen Substrate Heater

Manufacture : AJA International

• Specifications
  • SHQ400 Series
    • SHQ400-X Substrate Heaters
      • deliver up to 2000 watts
      • substrates to reach temperatures of up to 850℃(rotating) / 950℃(fixed).
      • models are available for 3" and 4" diameter
      • each unit includes
        • (2) UHV compatible quartz halogen lamps
        • water cooled reflcctor box
        • dual "K type" thermocouples (substrate holder, overtemperature protection)
        • dual ceramic power connectors for lamps
        • dual vacuum feedthroughs (TC's, lamp power)
        • vacuum compatible wiring and tubing
        • Both HV and UHV versions are available
        • DC and/or RF biasing of the substrate is an option for both fixed and rotating models
    • SHQ2000-C Programmable Heater Controller
      • unit included
    • RS485 computer interface
    • PIC substrate temperature controller
    • overtemperature controller with indicator lamp
    • lighted mains and lamp power switches
    • all cables and connectors