Magnetron Sputtering Systems Magnetron Sputtering Source
Power Supplies & Matching Networks Quartz Halogen Substrate Heaters


Magnetron Sputtering System
   

Manufacture : AJA International

ATC ORION Sputtering Systems : Compact, powerful UHV Tool for PVD

AJA International, Inc. introduces the highly versatile, compact, ATC ORION Series Sputtering System. The ATC Orion Series systems inherit many design features from the popular, highly evolved ATC Series Sputtering tools. These revolutionary systems also offer some unique features designed to optimize deposition uniformity. Three, four and five gun versions have been delivered with load-locks, high temperature substrate heaters and computer control. Economical HV versions are also available.


ATC ORION Sputtering sys - Compact series

¡Ü Available with Load Lock or N2 Glove Box
¡Ü 10" - 14" Chamber Diameter
¡Ü Cluster Flange Options
¡Ü Compact, economical design
¡Ü HV & UHV Versions
¡Ü Configured for your application

  


ATC Sputtering sys - Flagship series

¡Ü 13" - 34" Chamber Diameter
¡Ü HV & UHV Versions Available
¡Ü Load Lock Chamber & Cassette Options
¡Ü In-Situ Tilt Magnetrons
¡Ü Integrated Hoist or Hinged Chamber Lid
¡Ü Configured for your application


 

HYBRID SYSTEMS - UHV Sputtering & Evaporation

AJA International Inc. has delivered numerous multi-chamber ¡°HYBRID¡± physical vapor deposition (PVD) systems. This dual chamber UHV system contains (4) A320-XP 2¡± sputter sources with in-situ tilt in the sputter chamber and (2) K cells plus (1) four pocket e-beam source in the evaporation chamber. Each chamber is fitted with an 850¡Æ C rotating substrate heater. A single load-lock introduces the substrate and magnetic arms transfer it between chambers.

  


   




 

STXL SERIES - Large Magnetron Sputtering Sourcesn

AJA International, Inc. introduces the STXL Series of large magnetron sputter sources with a versatile modular magnet system. Circular target models range from 6¡± ? 12¡± diameter. Rectangular versions in 3¡± , 4¡± or 6¡± widths are offered up to 40¡± long. Both internal mount (via flex hose or solid tube) and external flange mount designs are available. High strength rare earth magnets are located outside the cooling water and are easily accessed for magnet modification. Sources can accommodate target materials bonded to a backing plate or one piece targets. Backing plates are directly water cooled for maximum cooling efficiency. 7/16 DIN coaxial cable powered DC sources and RF versions with close coupled matchboxes are offered for high power.

  


 



 

Magnetron Sputtering Sources & related accessories

  
     

Manufacture : AJA International

A300-XP
UHV Sputtering Sources


  • 1 to 10 diameter target
  • manual or in-situ source head tilt
  • intergral shutters and gas rings
  • convertible target module versions
  • custom designs available

 

UHV & HV CLuster Flange

  • CF, ISO or wire seal flanges
  • manual, insitu or linked in-situ tilt
  • integral shutters and gas rings
  • compact ORION cluster flanges
  • TURRET gusns for difficult retrofits
  • custom designs available
  
Stiletto & STXL
UH Sputtering Source


  • dia to 40 long, internal & external
  • tilt, shutter and gas ring options
  • target jacking for magnetic materials

 

Nautilus Sereis
Rotating magnetrons

  • 6 to 12 diameter targets
  • integrated hinge plate and gas ring
  • modular magnet array to optimize uniformity and target utilization

 

Cylindrical Target
Sputtering sources

  • ideal for low damage OLED applications
  • large sizes to coat all sides of substrate
  • pass through versions for wire/tube coating

 

  

 

Power Supplies & Matching Networks

  
     

Manufacture : AJA International

  • Specifications
     
    Power
    Model Number

    DC Power Supplies : Supplies feature efficient switching technoloty, power /voltage regulation, arc suppression, remote connector and interlocks
    500 watt
    A500DC
    1000 watt
    A1000DC
    1500 watt
    A1500DC

    RF Power Supplies : Solid state supplies are fully programmable with process storage and power ramp-up and down to reduce thermal stress on targets
    500 watt
    A500RF
    1000 watt
    A1000RF
    2000 watt
    A2000RF
    RF Auto-Matching : Networks feature one vacuum and one air capacitor for optimum relicablity. Air cooling is standard on smaller units.
    500 watt
    A500MU
    1000 watt
    A1000MU
    2000 watt
    A2000MU
    Low Power RF : Integrated power supply / manual matchbox makes this package ideal for powering small sources.
    100 watt
    A100RF/MM
 

Quartz Halogen Substrate Heater

  
     

Manufacture : AJA International

  • Specifications
    • SHQ400 Series
      • SHQ400-X Substrate Heaters
        • deliver up to 2000 watts
        • substrates to reach temperatures of up to 850¡É(rotating) / 950¡É(fixed).
        • models are available for 3" and 4" diameter
        • each unit includes
          • (2) UHV compatible quartz halogen lamps
          • water cooled reflcctor box
          • dual "K type" thermocouples (substrate holder, overtemperature protection)
          • dual ceramic power connectors for lamps
          • dual vacuum feedthroughs (TC's, lamp power)
          • vacuum compatible wiring and tubing
          • Both HV and UHV versions are available
          • DC and/or RF biasing of the substrate is an option for both fixed and rotating models
      • SHQ2000-C Programmable Heater Controller
        • unit included
          • RS485 computer interface
          • PIC substrate temperature controller
          • overtemperature controller with indicator lamp
          • lighted mains and lamp power switches
          • all cables and connectors