Cryopumps

Manufacture : Austin Scientific Company

We specialise in the manufacture and repair of cryogenic vacuum pumps, cryo-coolers (refrigerators) and helium compressors for semiconductor, optical coating, linear accelerators, medical equipment and R&D applications.

Model	Pumping Speed		Cooldown Time	Inlet Flange
Cryo-Plex 8	Air	1500 l/s	1.5 hours	6 inch ANSI
	Water	4000 l/s		(11.0" O.D)
	Hydrogen	2500 l/s		ISO NW200
	Argon	1200 l/s		10 inch CF
Cryo-Plex 8LP	Air	1500 l/s	1.5 hours	6 inch ANSI
	Water	4000 l/s		(11.0" O.D)
	Hydrogen	2200 l/s		ISO NW200
	Argon	1200 l/s		10 inch CF
Cryo-Plex 10	Air	3000 l/s	1.0 hours	10 inch ANSI
	Water	9000 l/s		(16.0" O.D)
	Hydrogen	5000 l/s		ISO NW 320
	Argon	2500 l/s		14 inch CF
Cryo-Plex 16	Air	5000 l/s	2.5 hours	16 inch CVC
	Water	16000 l/s		(17.7" O.D)
	Hydrogen	5000 l/s		ISO NW 400
	Argon	4200 l/s

Cryo-Plex 8LP

Cryo-Plex 8

Cryo-Plex 10

Compressors

Model	Helium Trhoughput	Cooling
M125	12.5 SCFM	Air or Water
M600	60 SCFM	Air or Water

Cryopump Control & Monitors

Model 2100 Automatic Cryopump Control

• Dual Silicon Diode Temp. Digital readout with three adjustable set points
• Thermocouple vacuum gauge digital readout with two adjustable set points
• Automatically provides power for roughing valve, purge gas valve, heaters, compressor relay coil and mechanical pump relay coil
• RS-232 computer interface avaiable

Model 310 & 320 Cryopump Monitors

• Range to 320K
• Calibrated for CTI type diode

Replacement parts & Accessories for Cryopumps

For Pumps of CTI, APD, Varian/Ebara, Leybold, Austin

• Cryopump Compressor Absorbers
• Cryopump Cryo-Adsorbing Arrays
• Power Supplies, Splitters & Cables
• Helium Lines
• Helium charge line
• Helium regulator
• Aeroquip fittingsroughing valve
• Purge gas vlave
• Blanket heater

  

Rebuilt Cryopumps for sale