Cryopumps Compressors
Cryopump Control & Monitors Replacement Parts & Accessories for Cryopumps

 

Cryopumps

 
     

Manufacture : Austin Scientific Company

We specialise in the manufacture and repair of cryogenic vacuum pumps, cryo-coolers (refrigerators) and helium compressors for semiconductor, optical coating, linear accelerators, medical equipment and R&D applications.

Model
Pumping Speed
Cooldown Time
Inlet Flange
Cryo-Plex 8
Air
1500 l/s
1.5 hours
6 inch ANSI
Water
4000 l/s
(11.0" O.D)
Hydrogen
2500 l/s
ISO NW200
Argon
1200 l/s
10 inch CF
Cryo-Plex 8LP
Air
1500 l/s
1.5 hours
6 inch ANSI
Water
4000 l/s
(11.0" O.D)
Hydrogen
2200 l/s
ISO NW200
Argon
1200 l/s
10 inch CF
Cryo-Plex 10
Air
3000 l/s
1.0 hours
10 inch ANSI
Water
9000 l/s
(16.0" O.D)
Hydrogen
5000 l/s
ISO NW 320
Argon
2500 l/s
14 inch CF
Cryo-Plex 16
Air
5000 l/s
2.5 hours
16 inch CVC
Water
16000 l/s
(17.7" O.D)
Hydrogen
5000 l/s
ISO NW 400
Argon
4200 l/s
 

Cryo-Plex 16


Cryo-Plex 8LP


Cryo-Plex 8


Cryo-Plex 10

Compressors

 
     
Model
Helium Trhoughput
Cooling
M125
12.5 SCFM
Air or Water
M600
60 SCFM
Air or Water
Multiple Pump / Compressor configuration Matrix
Model M125-w M125-A M600-W M600-A
Austin Scientific - CP8
1
1
3
3
Austin Scientific - CP10
2
2
Austin Scientific - CP16
1
1
Helix - CTI - CT-8 / CT-8OB
1
1
3
3
Helix - CTI - CT-10 / CT-10OB
2
2
Helix - CTI - CT-400
1
1
Number of Pumps supported per compressor

 

 



Cryopump Control & Monitors

 
     

Model 2100 Automatic Cryopump Control

  • Dual Silicon Diode Temp. Digital readout with three adjustable set points
  • Thermocouple vacuum gauge digital readout with two adjustable set points
  • Automatically provides power for roughing valve, purge gas valve, heaters, compressor relay coil and mechanical pump relay coil
  • RS-232 computer interface avaiable

Model 310 & 320 Cryopump Monitors

  • Range to 320K
  • Calibrated for CTI type diode
 

 

Replacement parts & Accessories for Cryopumps

   

For Pumps of CTI, APD, Varian/Ebara, Leybold, Austin

  • Cryopump Compressor Absorbers
  • Cryopump Cryo-Adsorbing Arrays
  • Power Supplies, Splitters & Cables
  • Helium Lines
  • Helium charge line
  • Helium regulator
  • Aeroquip fittingsroughing valve
  • Purge gas vlave
  • Blanket heater

 


Replacement parts & Accessories
(CTI Cryo-Torr 10 Cryopump

Rebuilt Cryopumps for sale